[Best Poster]

Title:
DESIGN AND FABRICATIONS OF PHOTONIC CRYSTAL (PHC) CAVITIES BASED ON GALLIUM NITRIDE (GAN) ON SAPPHIRE FOR BIOSENSING

Speaker(s):
Mohd Nuriman Bin Nawi and Ahmad Rifqi M. Zain

Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi- UKM, Selangor, Malaysia.
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Abstract:
Photonic crystal (PhC) provide a platform for realisation of a compact integrated optics device although limitation in fabrication process is still a major concern. We present the design, simulations and fabrications of a different types of Photonic Crystal (PhC) cavities based, based on Gallium Nitride (GaN) materials at the wavelength of around 400 nm to 500 nm. The device structures were simulated using 3D Finite difference Time Domain (FDTD) tools for various H1 and L3 cavity configurations. The structures were then realised using different fabrication approach - Focused Ion Beams (FIB) and Electron Beam Lithography (EBL). Different etching process using standard Reactive Ion Etching (RIE) tools and Inductively Coupled Plasma (ICP) were used to etch the end result of GaN layer.