Research Equipment
X-ray Photoelectron Spectrometer XPS
(SHIMADZU Corporation, Kratos AXIS-ULTRA DLD)
The X-ray source can be switched between Mg Kα and Al Kα, and the probe minimum diameter is 15 mm. In the case of Mg Kα, the measuring range is φ30 mm or less, Ag 3d 5/2 photoelectron peak is 0.8 eV or less in half width, and sensitivity is 1,100,000 cps or higher. In the case of Al Kα, the measuring range is φ30 mm or less, Ag 3d 5/2 photoelectron peak is 0.48 eV or less in half width, and sensitivity is 3,000 cps or higher. Constituent elements and the condition of electrons adjacent to the specimen surface can be analyzed. Elements to be measured are Li ~ U. The surface neutralizing mechanism uses low-energy electrons and neutralizes insulating materials evenly.
Features:
This spectrometer enables observation of microscopic regions with a Mg or Al (monochrome) X-ray source. Since it has 100ch or more detectors, the unit can detect microelements with high sensitivity, and can obtain a spectrum in good condition without scanning by means of an analyzer. In addition, with the use of an ion gun using polyatomic ions, it is possible to measure organic materials with less damage caused to specimens.
