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Clean Rooms
There are six clean rooms, which are controlled individually according to the requirements specified below.
Requirements of the Rooms
| 0.3μ class | Temperature（℃） | Humidity（％） | Difference from the outside atmospheric pressure (mmHg) | |
| CR1～4 | 1000 | 23±1 | 45±5 | 2.0 |
| CR5 | 100 | 23±1 | 45±5 | 3.0 |
| CR6 | 10 | 23±0.5 | 45±5 | 3.5 |
