Paper by Mizuta and Manoharan lab of Energy and Environment Area has been selected as a journal inside front cover.
Nanoscale 10(26), 12349-12355, 2018
Ngoc Huynh Van, Manoharan Muruganathan, Jothiramalingam Kulothungan, and Hiroshi Mizuta
Fabrication of a three-terminal graphene nanoelectromechanical switch using two-dimensional materials
We developed a three-terminal graphene nanoelectromechanical (3T-GNEM) switch with a physically isolated channel in the off-state by using heterogeneously stacked two-dimensional (2D) materials for the first time. Hexagonal boron nitride (h-BN) was used as a dielectric layer, and graphene was used as a the top double-clamped beam drain, gate and source electrode material; the drain, gate, and source layers were stacked vertically to achieve a small footprint. The drain to source contact is normally open with an air gap in the off-state, and the gate voltage is applied to mechanically deflect the drain terminal of the doubly clamped graphene beam to make electric contact with the source terminal for the on-state. This 3T-GNEM switch successfully exhibits the sub-thermal switching with the subthreshold slope (SS) as small as 10.4 mV dec−1 at room temperature, which is far below the theoretical limit of 〜 60 mV dec−1 for conventional MOSFETs.
This research was supported by Grant-in-Aid for Scientific Research KAKENHI (S) No. 25220904 from Japan Society for the Promotion of Science.
July 12, 2018